Use of methods “Selective change of atomic composition” of thin-film materials for creation functional nanostructures for various applications
Gurovich B.A., Kuleshova E.A., Prikhodko K.E.
National Research Centre “Kurchatov Institute”, Moscow, Russia, Kurchatov sq.1, 125183
Abstract:
The report is devoted to the physical basis of a new method’s complex of solids modification under ion irradiation that we called "selective change of atomic composition" and main possible applications of these methods in micro- and in future nanotechnology.
The complex of methods includes 3 methods: "Selective Removal of Atoms", "Selective Association of Atoms" and "Selective Displacement of Atoms". The combination of these methods expands a spectrum of materials capable to modification under ion irradiation.
We demonstrate the experimental results of application these techniques to form metal nanowires in insulator matrix, high density pattern magnetic media, passive and active low temperature superconducting nano- functional elements etc.
