Hybrid Silicon-polymer optofluidic ring resonator: toward a fully integrated optofluidic biosensing platform
Genni TESTA
(CNR-IREA)
Abstract:
We report the design, fabrication and characterization of an integrated liquid core optofluidic ring resonator (ORR) based on liquid core hybrid antiresonant reflecting optical waveguides (h-ARROWs). These devices merge optics and fluidics at the micron scale, enabling a strong light-matter interaction. With a suitable device design very promising bulk and surface sensing performances can be obtained. High quality factor up to 1.4E4 ring resonators have been fabricated with bulk refractive index sensitivity of about 700nm per refractive index unit (RIU). This sensitivity results in a RI limit of detection of about 1.6E-6 RIU. The hybrid Silicon-polymer fabrication approach has the potential to provide simple integration between the fluidic and optical elements, toward a fully integrated optofluidic biosensing platform.
